Title:
CMOS TECHNOLOGY FOR HIGHLY INTEGRATED BIOELECTRONIC AND CHEMO/BIOSENSOR SYSTEMS
By:
Dr. Andreas Hierlemann, Professor, ETH Zurich
Description:
Microfabrication techniques and, in particular, CMOS technology have been widely used to devise chemo/biosensors as well as bioelectronic and sensor microsystems in a generic approach. Examples of micromachined bio/chemosensors such as cantilevers, capacitors, thermosensor and microhotplates, some of which are also operated in liquid phase, will be shown. The sensor principle and the realization of the transducers in a standard CMOS process will be detailed. Then, advanced sensor microsystems combining one ore more transducer types will be presented. Several key criteria in developing such sensor systems will be pointed out. Moreover, the electrical interfacing of CMOS microelectronics with biological entities or electrogenic cells, i.e., cells that react upon electrical stimulation and, in turn, produce electrical signals (heart cells or neurons) will be shown and explained. CMOS-based, fully integrated microelectrode arrays for bidirectional communication (stimulation and recording) with electrogenic cells will be presented. These devices are capable of monitoring relevant electrophysiological responses of cells to electrical stimuli or to pharmacological agents with prospective applications in the field of bio-inspired information processing or pharmascreening.
Final Program